Description: Steag (AG Associates) Heatpulse 610 RTP Rapid Thermal Processing System Inventory No. 64819 Steag (AG Associates) Heatpulse 610 RTP Rapid Thermal Processing System. Manually loaded and capable of processing silicon and III-V substrates up to 150mm in diameter, Heatpulse 610 provides solutions to your process development and monitoring needs. Benchtop system for rapid thermal processing of semiconductor wafers up to 6” dia. max. (Depends on wafer tray with system). Performance Specifications Recommended Steady State Temperature Range: 400-1250° C.Steady-State Temperature Stability: ± 2° C.Temperature Monitoring Mechanisms: Extended Range Pyrometer (ERP), used throughout the recommended temperature range, or a thermocouple, used for process temperatures below 400° C.Heating Rate: 1-200° C per second, user-controllable.Cooling Rate: Temperature dependent; max 150° C per second.Maximum Non-uniformity:±5°C across a 6″ (150mm) wafer at 1150°C. (This is a one sigma deviation 100 angstrom oxide.) For a titanium silicidation process, no more than 4% increase in non-uniformity during the first anneal at 650°C to 700 °C.Post-anneal sheet resistivity measured on a 150mm wafer annealed at 1100° C for 10 seconds. R&D models optimized for slip control.Implant: As 1E16 50 KeV with implant uniformity ≤0.3% . Please contact us for additional information on this system, including lead-time, or for any questions via eBay mail.BID SERVICE has been meeting the equipment needs of the Semiconductor and Scientific communities for the past 30 years. Our expert refurbishing services, demonstration capabilities, and broad selection of inventory add up to value for our customers. *****International Buyers - Please Note: Import duties, taxes, and charges are not included in the item price or shipping cost. These charges are the buyer's responsibility. Please check with your country's customs office to determine what these additional costs will be prior to bidding or buying. Contact a freight forwarder who can get you actual prices.*****
Price: 19500 USD
Location: Freehold, New Jersey
End Time: 2025-01-06T16:37:38.000Z
Shipping Cost: N/A USD
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Item Specifics
Restocking Fee: No
Return shipping will be paid by: Buyer
All returns accepted: Returns Accepted
Item must be returned within: 30 Days
Refund will be given as: Money Back
Non-Domestic Product: No
Brand: Steag AG Associates
Custom Bundle: No
Model: Heatpulse 610 RTP
MPN: Does Not Apply
Modified Item: No
